SED-9ZKDM-A — Multi-Arc Ion Plating Vacuum Coating Machine
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SED-9ZKDM-A is a multi-arc cathode vacuum coating (PVD) machine. Octagonal SUS304 vacuum chamber Φ1180 × H1000mm. Ultimate vacuum better than 5×10⁻⁴ Pa. Pump-down to 6×10⁻³ Pa in <18 min. Pressure rise rate <0.3 Pa/h. Eq
مبدأ العمل
1) Evacuation: Three Taiyueheng FF250/1600 turbomolecular pumps + Zhuojie hydraulic-coupling 300 Roots pump + three Zhuojie RVP-25 mechanical pumps draw the chamber to 5×10⁻⁴ Pa via GDQ-250 three-in-one valve and motorised louvre gate valve(side-mounted, 0-90°). 2) Baking: 36 kW disc heater raises substrate temperature to process temperature(RT – 500 °C, SCR intelligent control ±8 °C). 3) Gas distribution: Burkert MFC flowmeters precisely control N₂ (2000 sccm), Ar(1000 sccm), C₂H₂ (500 sccm), O₂ (500 sccm) with upstream solenoid valves, mixing tank, and dual-layer microporous zone distribution. 4) Coating: NineΦ160 arc sources(electromagnetic coils + multi-field configuration, high ionisation rate) + two IET large arc sources on the door strike Ti targets; arc power supply 250 A / 25 V. HÜTTINGER DC4020 bias supply applies substrate bias. 5) Uniform deposition: turntable at 1-5 rpm public revolution + 12 self-rotating shafts; independent water cooling on each subsystem with low-water alarms; Schneider contactors/relays in control cabinet.