SED-450ZFDM-J — Laboratory Vacuum Evaporation Coating Machine
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The SED-450ZFDM-J is a laboratory-scale metalization (vacuum coating) machine combining thermal evaporation and DC magnetron sputtering. The single-door vacuum chamber is Φ450 × H400 mm with an observation window and a s
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The vacuum chamber is evacuated by the rotary-vane backing pump and the KT-150 diffusion pump down to high vacuum. Substrates mounted on the 8-shaft rotating frame undergo planetary motion(revolution + rotation) for uniform coating. For evaporation, the 6 kVA/12 V transformer heats the source until the metal evaporates and condenses on the substrates. For magnetron sputtering, a 5 kW DC supply ionizes the working gas(controlled at 200 SCCM); ions sputter aluminum from the cylindrical target onto the substrates.