SED-2LSJ-A — Laser Repair Machine

An Nd:YAG solid-state pulsed laser generates 1064 nm near-infrared light. Passing through a KTP crystal and filter wheel allows selection of 532 nm second harmonic. The beam is directed through a precision optical path (Mitutoyo M Plan APO observation objective for alignment + Mitutoyo NIR laser processing objective for cutting) and focused to a high-energy spot. A microscope imaging system aligns the laser to the target defect. The precision XY/Z servo stage positions the workpiece. Laser pulses perform dot (3 μm × 3 μm), line (50 μm × 3 μm), or block (50 μm × 50 μm) cutting of passivation layers (SiO/SiN) and metal interconnects (aluminum) to remove short-circuit defects in TFT-LCD/OLED panels.